• All sections
• H - Electricity
• H01L - Semiconductor devices not covered by class
• H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

Patent holdings for IPC class H01L 21/687

Total number of patents in this class: 6318

10-year publication summary

Principal owners for this class